Coating equipment for preparing DLC and application thereof
The invention provides coating equipment for preparing a DLC and application thereof. The coating equipment comprises a cavity, a group of conveying pipelines, at least one air extractor, at least oneair extraction pipeline, a power supply device and at least one electrode bracket, wherein the cavit...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides coating equipment for preparing a DLC and application thereof. The coating equipment comprises a cavity, a group of conveying pipelines, at least one air extractor, at least oneair extraction pipeline, a power supply device and at least one electrode bracket, wherein the cavity is provided with a chamber; the electrode bracket is arranged in the cavity and used for supporting the base material; the conveying pipeline is communicated with the chamber and is used for introducing a gas raw material into the chamber; the air extractor is communicated with the cavity throughthe air extracting pipeline, carries out negative pressure operation on the cavity and controls air pressure in the chamber; and the power supply device is electrically connected to the electrode bracket so that the DLC film can be prepared on the surface of the base material through the coating equipment in a chemical vapor deposition mode.
本发明提供一种用于制备DLC的镀膜设备及其应用,其中所述镀膜设备包括一腔体、一组输送管路、至少一抽气装置、至少一抽气管路、一供电装置以及至少一电极支架,其中所述腔 |
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