Tank, and chemical solution supply system

The present invention provides a tank for handling various chemical solutions, wherein it is possible to prevent electrical charging of the tank contents and reduce contamination of the tank contents.The tank includes a tank outer housing, and a lining layer on the inner surface thereof. The lining...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KATO MASAHIDE, NOGUCHI ISAMU, KAWATO SUSUMU, YAMAMOTO HIROKAZU, ITAMI HIROTAKA, TSUKAMOTO TADAKAZU
Format: Patent
Sprache:chi ; eng
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