Tank, and chemical solution supply system

The present invention provides a tank for handling various chemical solutions, wherein it is possible to prevent electrical charging of the tank contents and reduce contamination of the tank contents.The tank includes a tank outer housing, and a lining layer on the inner surface thereof. The lining...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KATO MASAHIDE, NOGUCHI ISAMU, KAWATO SUSUMU, YAMAMOTO HIROKAZU, ITAMI HIROTAKA, TSUKAMOTO TADAKAZU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention provides a tank for handling various chemical solutions, wherein it is possible to prevent electrical charging of the tank contents and reduce contamination of the tank contents.The tank includes a tank outer housing, and a lining layer on the inner surface thereof. The lining layer at least partially includes a composite resin material including a fluororesin A and carbon nanotubes. The fluororesin A is selected from the group consisting of polytetrafluoroethylene, modified polytetrafluoroethylene, tetrafluoroethylene/perfluoroalkyl vinyl ether copolymers, tetrafluoroethylene/hexafluoropropylene copolymers, tetrafluoroethylene/ethylene copolymers, polyvinylidene fluoride, polychlorotrifluoroethylene, chlorotrifluoroethylene/ethylene copolymers, and polyvinyl fluoride. 本发明提供一种处理各种药液的槽,该槽能够防止槽内容物的带电,减少槽内容物的污染。本发明的槽具有槽外罐和在其内表面的衬里层,衬里层在至少一部分中包含含有氟树脂A和碳纳米管的复合树脂材料,氟树脂A选自聚四氟乙烯、改性聚四氟乙烯、四氟乙烯/全氟烷基乙烯基醚共聚物、四氟乙烯/六氟丙烯共聚物、四氟乙烯/乙烯共聚物、聚偏氟乙烯、聚氯三氟乙烯、氯三氟乙烯/乙烯共聚物和聚氟乙烯。