Vacuum degree monitoring device

The invention provides a vacuum degree monitoring device. The device comprises a vacuum gauge (100), a data transmission line (200), a vacuum gauge pipe (500) connected with the data transmission line, and a monitoring object connecting pipe connected with the vacuum gauge pipe, wherein the other en...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU XIAOJUN, XIN HAIYA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a vacuum degree monitoring device. The device comprises a vacuum gauge (100), a data transmission line (200), a vacuum gauge pipe (500) connected with the data transmission line, and a monitoring object connecting pipe connected with the vacuum gauge pipe, wherein the other end of the monitoring object connecting pipe is connected with a vacuum monitoring object, an air inlet end (530a) of the vacuum gauge pipe is provided with a first flange plate (530), a second flange plate is arranged at an air outlet end (410a) of the monitored object connecting pipe, the first flange plate (530) and the second flange plate (410) are attached together in a sealed mode, and a clamp (300) is fastened to an outer surface of the joint of the first flange plate (530) and the second flange plate (410) to fasten the butt joint of the first flange plate and the second flange plate. 本发明提供一种真空度监测装置,其包含真空计(100)、数据传输线(200)、与数据传输线连接的真空规管(500)以及与真空规管连接的监测对象连接管,所述监测对象连接管的另一端连接真空监测对象,所述真空规管的进气端(530a)设置第一法兰盘(530),在