Cooling water path early warning method, cooling water path early warning system and semiconductor processing equipment
The invention provides a cooling water path early warning method, a cooling water path early warning system and semiconductor processing equipment. An on-off valve is arranged on a cooling water path;and the cooling water path comprises a control unit used for controlling the on-off valve. The cooli...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | CHENG XUWEN |
| description | The invention provides a cooling water path early warning method, a cooling water path early warning system and semiconductor processing equipment. An on-off valve is arranged on a cooling water path;and the cooling water path comprises a control unit used for controlling the on-off valve. The cooling water path early warning method comprises the following steps that: when operation equipment isstarted, the internal temperature of the operation equipment, control signals for the on-off valve emitted by the control unit and the flow of the cooling water path are monitored; whether at least one of the flow abnormality of the cooling water path, the fault of the on-off valve and the fault of the control unit occurs or not is judged according to a monitoring result; and if at least one of the flow abnormality of the cooling water path, the fault of the on-off valve and the fault of the control unit occurs, an alarm can be emitted. With the cooling water path early warning method, the cooling water path early warn |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN110857871A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN110857871A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN110857871A3</originalsourceid><addsrcrecordid>eNqNyrEKwjAUheEuDqK-Q9wVDCLtKkFxcnIvIT3aQpIbc28pfXtbcNfpwH--ZTEYIt_FlxqsIKtkpVWw2Y9TyHE-AqSlZqfcL8gjC4KysVGM0DmKTe-EJpvJgXk2ePddCoiyLhZP6xmb766K7fXyMLc9EtXgZB0ipDZ3rQ_VqaxKfT7-Yz7Lfkbf</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Cooling water path early warning method, cooling water path early warning system and semiconductor processing equipment</title><source>esp@cenet</source><creator>CHENG XUWEN</creator><creatorcontrib>CHENG XUWEN</creatorcontrib><description>The invention provides a cooling water path early warning method, a cooling water path early warning system and semiconductor processing equipment. An on-off valve is arranged on a cooling water path;and the cooling water path comprises a control unit used for controlling the on-off valve. The cooling water path early warning method comprises the following steps that: when operation equipment isstarted, the internal temperature of the operation equipment, control signals for the on-off valve emitted by the control unit and the flow of the cooling water path are monitored; whether at least one of the flow abnormality of the cooling water path, the fault of the on-off valve and the fault of the control unit occurs or not is judged according to a monitoring result; and if at least one of the flow abnormality of the cooling water path, the fault of the on-off valve and the fault of the control unit occurs, an alarm can be emitted. With the cooling water path early warning method, the cooling water path early warn</description><language>chi ; eng</language><subject>ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS ; BASIC ELECTRIC ELEMENTS ; CONTROL OR REGULATING SYSTEMS IN GENERAL ; CONTROLLING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS ; MEASURING ; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE ; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR ; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ; PHYSICS ; REGULATING ; SEMICONDUCTOR DEVICES ; TARIFF METERING APPARATUS ; TESTING</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200303&DB=EPODOC&CC=CN&NR=110857871A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200303&DB=EPODOC&CC=CN&NR=110857871A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHENG XUWEN</creatorcontrib><title>Cooling water path early warning method, cooling water path early warning system and semiconductor processing equipment</title><description>The invention provides a cooling water path early warning method, a cooling water path early warning system and semiconductor processing equipment. An on-off valve is arranged on a cooling water path;and the cooling water path comprises a control unit used for controlling the on-off valve. The cooling water path early warning method comprises the following steps that: when operation equipment isstarted, the internal temperature of the operation equipment, control signals for the on-off valve emitted by the control unit and the flow of the cooling water path are monitored; whether at least one of the flow abnormality of the cooling water path, the fault of the on-off valve and the fault of the control unit occurs or not is judged according to a monitoring result; and if at least one of the flow abnormality of the cooling water path, the fault of the on-off valve and the fault of the control unit occurs, an alarm can be emitted. With the cooling water path early warning method, the cooling water path early warn</description><subject>ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL</subject><subject>CONTROLLING</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</subject><subject>MEASURING</subject><subject>MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE</subject><subject>MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR</subject><subject>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</subject><subject>PHYSICS</subject><subject>REGULATING</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TARIFF METERING APPARATUS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyrEKwjAUheEuDqK-Q9wVDCLtKkFxcnIvIT3aQpIbc28pfXtbcNfpwH--ZTEYIt_FlxqsIKtkpVWw2Y9TyHE-AqSlZqfcL8gjC4KysVGM0DmKTe-EJpvJgXk2ePddCoiyLhZP6xmb766K7fXyMLc9EtXgZB0ipDZ3rQ_VqaxKfT7-Yz7Lfkbf</recordid><startdate>20200303</startdate><enddate>20200303</enddate><creator>CHENG XUWEN</creator><scope>EVB</scope></search><sort><creationdate>20200303</creationdate><title>Cooling water path early warning method, cooling water path early warning system and semiconductor processing equipment</title><author>CHENG XUWEN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN110857871A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2020</creationdate><topic>ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CONTROL OR REGULATING SYSTEMS IN GENERAL</topic><topic>CONTROLLING</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</topic><topic>MEASURING</topic><topic>MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE</topic><topic>MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR</topic><topic>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</topic><topic>PHYSICS</topic><topic>REGULATING</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TARIFF METERING APPARATUS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>CHENG XUWEN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHENG XUWEN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Cooling water path early warning method, cooling water path early warning system and semiconductor processing equipment</title><date>2020-03-03</date><risdate>2020</risdate><abstract>The invention provides a cooling water path early warning method, a cooling water path early warning system and semiconductor processing equipment. An on-off valve is arranged on a cooling water path;and the cooling water path comprises a control unit used for controlling the on-off valve. The cooling water path early warning method comprises the following steps that: when operation equipment isstarted, the internal temperature of the operation equipment, control signals for the on-off valve emitted by the control unit and the flow of the cooling water path are monitored; whether at least one of the flow abnormality of the cooling water path, the fault of the on-off valve and the fault of the control unit occurs or not is judged according to a monitoring result; and if at least one of the flow abnormality of the cooling water path, the fault of the on-off valve and the fault of the control unit occurs, an alarm can be emitted. With the cooling water path early warning method, the cooling water path early warn</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN110857871A |
| source | esp@cenet |
| subjects | ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES TARIFF METERING APPARATUS TESTING |
| title | Cooling water path early warning method, cooling water path early warning system and semiconductor processing equipment |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-16T18%3A10%3A20IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=CHENG%20XUWEN&rft.date=2020-03-03&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN110857871A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |