Cooling water path early warning method, cooling water path early warning system and semiconductor processing equipment

The invention provides a cooling water path early warning method, a cooling water path early warning system and semiconductor processing equipment. An on-off valve is arranged on a cooling water path;and the cooling water path comprises a control unit used for controlling the on-off valve. The cooling water path early warning method comprises the following steps that: when operation equipment isstarted, the internal temperature of the operation equipment, control signals for the on-off valve emitted by the control unit and the flow of the cooling water path are monitored; whether at least one of the flow abnormality of the cooling water path, the fault of the on-off valve and the fault of the control unit occurs or not is judged according to a monitoring result; and if at least one of the flow abnormality of the cooling water path, the fault of the on-off valve and the fault of the control unit occurs, an alarm can be emitted. With the cooling water path early warning method, the cooling water path early warn