LaBiO3 film, and LaBiO3 ceramic target material and preparation method thereof

The invention provides a preparation method of a LaBiO3 ceramic target material. The preparation method comprises the following steps: A) mixing La2O3 and Bi2O3, and carrying out ball milling and grading treatment to obtain an initial mixture; B) placing the initial mixture on an alumina gasket, car...

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Bibliographische Detailangaben
Hauptverfasser:	LU QINWEN, ZHAO AIDI, ZHAI XIAOFANG, LIU QIXIN, ZHANG JINGXIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	The invention provides a preparation method of a LaBiO3 ceramic target material. The preparation method comprises the following steps: A) mixing La2O3 and Bi2O3, and carrying out ball milling and grading treatment to obtain an initial mixture; B) placing the initial mixture on an alumina gasket, carrying out presintering, and then performing cooling to obtain initial sintered powder; C) mixing theinitial sintered powder with an adhesive, carrying out drying and performing blank preparation to obtain a ceramic body; and D) placing the ceramic body on an alumina gasket, carrying out sintering again, and performing cooling to obtain the LaBiO3 ceramic target material. The invention also provides the LaBiO3 ceramic target material and application thereof. The LaBiO3 ceramic target material provided by the invention has the advantages of simple preparation, high purity, high density, uniform components, smooth surface and good stability. 本发明提供了LaBiO陶瓷靶材的制备方法，包括以下步骤：A)将LaO和BiO混合后球磨，分级处理后得到初始混合物；B)将所述初始混合物放置于氧化铝垫片上后