Eight-cavity vertical PECVD-PVD integrated device for solar cell manufacturing

The invention relates to an eight-cavity vertical PECVD-PVD integrated device for solar cell manufacturing. A vacuum preheating feeding cavity, an intrinsic amorphous silicon thin film deposition PECVD cavity, a doped amorphous silicon thin film deposition PECVD cavity, a first TCO thin film deposit...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	REN DONGLIANG, HUANG HAIBIN, ZHOU LANG, HUANG ZHEN, PENG DEXIANG, LIU CHAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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