Laser system and lithographic apparatus

The invention provides a laser system. The system comprises a sub-laser device configured to emit an output laser, and a laser power amplification device configured to amplify the power of the outputlaser and emit the output laser, wherein the laser power amplification device comprises an accommodating cavity used for accommodating a gain medium and comprising a first opening, a second opening, an incident light-transmitting element arranged at the first opening, an emergent light-transmitting element arranged at the second opening, and an energy pump configured to provide energy for the gainmedium, and a first Brewster angle is formed between the incident light-transmitting element and the output laser. The present disclosure further provides a lithographic apparatus. 一种激光系统，包括一种子激光装置，配置以发射一输出激光、以及一激光功率放大装置，配置以放大输出激光的功率并发射输出激光。激光功率放大装置包括一容置腔，用以容纳一增益介质，包括一第一开口以及一第二开口、一入射透光元件，设置于第一开口、一出射透光元件，设置于第二开口、以及一能量泵浦，配置以提供能量于增益介质。入射透光元件与输出激光之间具有一第一布鲁斯特角。本公开还提供一种光刻设备。