Apparatus and method for detecting failure in mechanical press

An apparatus and a method for detecting a failure in a press for punching semiconductor devices are provided, where the method comprises the steps of locating a semiconductor device between a first die-set part and a second die-set part comprised in the press, and moving the first die-set part and t...

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Bibliographische Detailangaben
Hauptverfasser: LI HONG-YEUNG, LAW KWOK-PUN, LEUNG CHO-WAI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:An apparatus and a method for detecting a failure in a press for punching semiconductor devices are provided, where the method comprises the steps of locating a semiconductor device between a first die-set part and a second die-set part comprised in the press, and moving the first die-set part and the second die-set part relative to each other for punching the semiconductor device therebetween. The method further comprises the steps of monitoring a parameter with a sensor attached to the first die-set part and/or the second die-set part at different positions of the first die-set part when itis moving relative to the second die set part while punching the semiconductor device, and comparing a present variation of the parameter at different positions of the first die-set part relative to the second die-set part against an expected variation of the parameter at positions of the first die-set part relative to the second die-set part during normal operation of the press when there is no failure while punching the