Wafer detection tool

The invention provides a wafer detection tool, which is characterized by comprising a tray and a fixing piece, wherein the tray is provided with an accommodation groove, the bottom of the accommodation groove is provided with a through hole, the depth of the accommodation groove is greater than the thickness of a to-be-detected wafer, and the size of the through hole is smaller than the size of the to-be-detected wafer; and the fixing piece is arranged towards the accommodation groove, and the fixing piece is used for enabling the surface of one side of the to-be-detected wafer to abut againstthe bottom of the accommodation groove so as to seal the through hole through the to-be-detected wafer. Thus, according to the wafer detection tool provided by the embodiment of the invention, the tray with the accommodation groove is arranged, a to-be-detected wafer can be accommodated in the accommodation groove, and the loss of reaction liquid and the possibility of the operator contacting with the reaction liquid are