Micro-beam nonlinear vibration combination signal generation device based on multi-frequency excitation

The invention discloses a micro-beam nonlinear vibration combination signal generation device based on multi-frequency excitation. The micro-beam nonlinear vibration combination signal generation device comprises two parts including a signal driving device and a signal collection device. The signal driving device is composed of an upper pole plate driving direct-current power source, an upper poleplate driving alternating-current power source, an upper pole plate, a micro-beam, a lower pole plate, a lower pole plate driving alternating-current power source, a lower pole plate driving direct-current power source and a fixed end. The signal collection device is composed of a piezoresistance vibration signal collector, divider resistors, a signal collection power source, a signal power amplifier, frequency duplication signals and a band-pass filter. When the frequency of combination signals is close to the inherent frequency of a vibration system, the micro-beam generates nonlinear combination vibration, then co