SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS

The invention relates to a substrate treating method and a substrate treating apparatus. The substrate treating apparatus includes a process module including a plurality of process units that performa plurality of steps included in a substrate treating process and that perform the substrate treating...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SEO TAE WOONG, LEE TAERIM, UM YOUNGJE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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