Support table, support table assembly, processing arrangement, and methods thereof

The present invention discloses a support table, a support table assembly, a processing arrangement, and methods thereof. According to various embodiments, a support table (100) may include: a baseplate (102) including a support structure (104), the support structure (104) defining a support region over the baseplate (102) to support at least one of a workpiece or a workpiece carrier (200) therein; and one or more light-emitting components (106) disposed between the baseplate (102) and the support region (104r). The one or more light-emitting components (106r) are configured to emit light intothe support region (104r). 公开了支承台、支承台组装、处理装置及其方法。根据各种实施例，支承台（100）可以包括：基板（102），其包括支承结构（104），支承结构（104）限定在基板（102）上方的支承区（104r）以在其中支承工件或者工件载体（200）中的至少一个；以及一个或多个发光组件（106），其被部署在基板（102）和支承区（104r）之间，其中一个或多个发光组件（106r）被配置为将光发射到支承区（104r）中。