Ultra-precise hydrostatic pressure rotary table
The invention provides an ultra-precise hydrostatic pressure rotary table in order to improve the precision and the rigidity of the rotary table, and belongs to the technical field of ultra-precise manufacturing equipment. According to the specific scheme, the ultra-precise hydrostatic pressure rota...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides an ultra-precise hydrostatic pressure rotary table in order to improve the precision and the rigidity of the rotary table, and belongs to the technical field of ultra-precise manufacturing equipment. According to the specific scheme, the ultra-precise hydrostatic pressure rotary table comprises a workbench, a circular grating, reading heads, a bearing rotor, a bearing stator, a motor, a shell body and a base; and the workbench is fixed to the upper surface of the bearing rotor, the circular grating sleeves the bearing rotor, the reading heads are fixed to the shell bodyand opposite to the circular grating, a trapezoidal groove is formed in the circumferential direction of the bearing rotor, the bearing stator is sleeved with the trapezoidal groove in a matched manner and makes contact with the bearing rotor, multiple oil through holes communicating with the inner surface and the peripheral face are formed in the bearing stator, the bearing stator is fixedly connected with the base, and |
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