PARTICLE REMOVAL APPARATUS AND ASSOCIATED SYSTEM

An apparatus (16) for removing particles from a clamp (4), the apparatus being arrangeable in proximity of the clamp and comprising an insulating portion (18), a supporting portion (20), at least a part or all of the insulating portion being arranged on the supporting portion, wherein the supporting...

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Bibliographische Detailangaben
Hauptverfasser:	BALTIS COEN HUBERTUS MATHEUS, VAN DUIVENBODE JEROEN, VAN GILS PETRUS JOHANNES MARIA, VAN DEN OEVER PETRUS JOHANNES
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	An apparatus (16) for removing particles from a clamp (4), the apparatus being arrangeable in proximity of the clamp and comprising an insulating portion (18), a supporting portion (20), at least a part or all of the insulating portion being arranged on the supporting portion, wherein the supporting portion is configured such that when a voltage is applied to the supporting portion of the apparatus and/or to an electrode (8) of the clamp, the supporting portion acts as an electrode to allow an electric field to be generated between the apparatus and the clamp for removal of the particles fromthe clamp. 一种用于从夹具(4)去除颗粒的设备(16)，该设备可布置在夹具附近，并且包括：绝缘部分(18)；支撑部分(20)，绝缘部分的至少一部分或全部被布置在支撑部分上，其中支撑部分被配置使得当电压被施加到设备的支撑部分和/或夹具的电极(8)时，支撑部分充当电极，以允许在设备与夹具之间生成电场，以用于从夹具去除颗粒。