Vapor deposition equipment capable of detecting performance of gas separation membrane on line, and membrane preparation method

The invention discloses vapor deposition equipment capable of detecting the performance of a gas separation membrane on line, and a membrane preparation method, and belongs to the fields of vapor deposition and gas separation membranes. The vapor deposition equipment comprises an intake system, a va...

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Bibliographische Detailangaben
Hauptverfasser:	WANG LAIJUN, XU LUFEI, ZHANG PING, CHEN SONGZHE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METALLURGY METERING BY VOLUME PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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Beschreibung
Zusammenfassung:	The invention discloses vapor deposition equipment capable of detecting the performance of a gas separation membrane on line, and a membrane preparation method, and belongs to the fields of vapor deposition and gas separation membranes. The vapor deposition equipment comprises an intake system, a vacuum system, a vapor deposition system and an online detection system, wherein the intake system isa double-carrier-gas intake system; the intake system is connected with the vapor deposition system, the vapor deposition system is connected with the intake system, the vacuum system and the online detection system, the vacuum system is connected with the vapor deposition system and the online detection system, and the online detection system is connected with the vacuum system and the vapor deposition system; during preparation for the gas separation membrane, two carrier gases carry deposition sources and enter into the vapor deposition system, and the gas separation membrane is obtained through vapor deposition; a