SEMICONDUCTOR INSPECTION DEVICE

An inspection system 1 is provided with: a light source 33; a mirror 40b; Galvano mirrors 44a, 44b; a housing 32 in which the mirror 40b and the Galvano mirrors 44a, 44b are held and which has a mounting part 46 for having an optical element mounted thereon; and a control unit 21a which controls the deflection angles of the Galvano mirrors 44a, 44b, wherein the control unit 21a controls the deflection angles such that the optical path to be optically connected to a semiconductor device D is switched to either a first optical path L1 passing through the Galvano mirrors 44a, 44b and the mirror 40b or a second optical path L2 passing through the Galvano mirrors 44a, 44b and the mounting part 46, and that the deflection angle set by switching to the first optical path L1 and the deflection angle set by switching to the second optical path L2 do not overlap each other. 检查系统(1)具备：光源(33)；镜(40b)；检流计镜(44a、44b)；壳体(32)，其在内部保持镜(40b)与检流计镜(44a、44b)，且具有用于安装光学元件的安装部(46)；及控制部(21a)，其控制检流计镜(44a、44b)的偏转角；控制部(21a)以在通过检流计镜(44a、44b