DETECTOR FOR X-RAY IMAGING
Disclosed is an edge-on photon counting detector and a method for manufacturing a charge collecting side of such detector. The edge-on photon counting detector comprises a semi-conducting substrate. The semi-conducting substrate comprises, a first end adapted to face an x-ray source and a second end...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Disclosed is an edge-on photon counting detector and a method for manufacturing a charge collecting side of such detector. The edge-on photon counting detector comprises a semi-conducting substrate. The semi-conducting substrate comprises, a first end adapted to face an x-ray source and a second end opposite the first end in the direction of incoming x-rays, and at least one strip having N depth segments, N>2, each of the depth segments comprising a charge collecting metal electrode and a charge collecting side comprising doped regions and insulating regions, wherein each of the charge collecting metal electrodes is arranged over a corresponding doped region and is connected to a respective routing trace arranged on the insulating regions, the respective routing trace being adapted to conduct signals from the charge collecting metal electrode to a read-out pad E, connectable to front-end electronics, arranged at the second end.
公开了一种边缘接通光子计数检测器以及用于制造这种检测器的电荷收集侧的方法。边缘接通光子计数检测器包括半导体衬底。该半导体衬底包括:适于面对x射线源的第一端和在入射x |
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