Pressure detection unit and pressure sensor using same
The invention provides a pressure detection unit and a pressure sensor which can realize stabilization and miniaturization of an output value and reduce cost. The pressure detection unit is provided with: a diaphragm (50) that receives the pressure of a fluid; a base (40), wherein a pressure receivi...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a pressure detection unit and a pressure sensor which can realize stabilization and miniaturization of an output value and reduce cost. The pressure detection unit is provided with: a diaphragm (50) that receives the pressure of a fluid; a base (40), wherein a pressure receiving space (S1) in which a medium is sealed is formed between the base (40) and the diaphragm (50); apressure detection device (60) that is disposed on the base (40) in the pressure receiving space (S1), detects the pressure transmitted to a medium, and converts the pressure into an electric pressuresignal; and a plurality of terminal pins (70-74) for electrically connecting between the pressure detection device (60) and an external circuit, the plurality of terminal pins (70-74) forming insulating layers at portions of the diaphragm (50) and the base (40) facing the pressure receiving space (S1).
本发明提供一种能够实现输出值的稳定化和小型化并且降低成本的压力检测单元和压力传感器。压力检测单元具有:膜片(50),该膜片(50)承受流体的压力;基座(40),在该基座(40)与所述膜片(50)之间形成封入有介质的受压空间(S1);压力检测装 |
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