Texturing additive for diamond wire polycrystalline silicon wafers and texturing etching solution for diamond wire polycrystalline silicon wafers

The invention discloses a texturing additive for diamond wire polycrystalline silicon wafers and a texturing etching liquid using the additive for the polycrystalline silicon wafers. The texturing additive for the diamond wire polycrystalline silicon wafers comprises a low-viscosity low-foam-stabili...

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Hauptverfasser: YI WUXIONG, PAN DINGDING, WANG YIZHE, ZHANG WEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a texturing additive for diamond wire polycrystalline silicon wafers and a texturing etching liquid using the additive for the polycrystalline silicon wafers. The texturing additive for the diamond wire polycrystalline silicon wafers comprises a low-viscosity low-foam-stability component, a high-viscosity high-foam-stability component and deionized water, wherein the low-viscosity low-foam-stability component comprises oxalic acid, tartaric acid, citric acid, a soluble citrate, an isomeric alcohol ether and a quaternary ammonium salt cationic surfactant, and the high-viscosity high-foam-stability component comprises polyethylene glycol, methoxypolyethylene glycol and a gimini quaternary ammonium salt cationic surfactant. By using the texturing additive provided by the invention, the textured microstructure of the diamond wire silicon wafers can be modulated, the reflectivity of the diamond wire polycrystalline silicon wafers is effectively reduced, and the lighttrapping effect is impro