ICPMS test method and ICPMS scanning platform

The invention discloses an ICPMS test method and an ICPMS scanning platform. The method comprises steps of etching a silicon wafer, fixing the etched silicon wafer on the ICPMS scanning platform, making VPD liquid drops roll on a surface of the silicon wafer, collecting metal components on the surfa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YUE SIYU, LYU YABING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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