ELECTROSTATIC MEMS ACTUATOR AND METHOD FOR THE PRODUCTION THEREOF

An MEMS comprises a substrate which has a cavity, and a movable element which is arranged in the cavity and comprises a first electrode, a second electrode and a third electrode which is arranged between the first and second electrodes and is fixed in position such that it is electrically insulated...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LANGA SERGIU, CONRAD HOLGER, GAUDET MATTHIEU, SCHIMMANZ KLAUS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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