ELECTROSTATIC MEMS ACTUATOR AND METHOD FOR THE PRODUCTION THEREOF

An MEMS comprises a substrate which has a cavity, and a movable element which is arranged in the cavity and comprises a first electrode, a second electrode and a third electrode which is arranged between the first and second electrodes and is fixed in position such that it is electrically insulated from said electrodes in discrete regions. The movable element is designed to execute a movement along a movement direction in a substrate plane in response to an electrical potential between the first electrode and the third electrode or in response to an electrical potential between the second electrode and the third electrode. A dimension of the third electrode perpendicular to the substrate plane is smaller than a dimension of the first electrode and a dimension of the second electrode perpendicular to the substrate plane. MEMS包括：基板，包括腔体；以及可移动元件，布置在腔体中，包括第一电极、第二电极和第三电极，该第三电极布置在第一电极和第二电极之间并且以与第一电极和第二电极电绝缘的方式固定在分立区域。可移动元件被构造成响应于第一电极和第三电极之间的电势或响应于第二电极和第三电极之间的电势而在基板平面内沿着移动方向执行移动。第三电极垂直于基板平面的尺寸小于第一电极垂直于基板平面的尺寸和第二电极垂直