Substrate detection apparatus and substrate processing apparatus

The invention provides a substrate detection apparatus and a substrate processing apparatus capable of improving the quality of a substrate. The substrate detection device (40) according to an embodiment is provided with: a base section (41); a swing member (42) swingably attached to the base (41) about a swing fulcrum shaft (42a); a detection roller (43) which is provided at one end of the swingmember (42) and is pushed down by coming into contact with the conveyed substrate; and a detection sensor (45) that outputs a detection signal indicating that the substrate is detected when the detection roller (43) is pushed down by coming into contact with the substrate and moves centered on the swing fulcrum axis (42a). The swing fulcrum shaft (42a) is parallel to the substrate conveyance direction (A1). 提供一种能够使基板品质提高的基板检测装置及基板处理装置。有关实施方式的基板检测装置(40)具备：基部(41)；摆动部件(42)，以摆动支点轴(42a)为中心摆动自如地安装于基部(41)；检测辊(43)，设置在摆动部件(42)的一端部，与被输送来的基板碰抵而被推下；以及检测传感器(45)，如果检测辊(43)碰抵在基板上而被推下、并以摆动支点轴(42a)为中心移动，则输出表示检测到基板的检测信号；摆动支点轴(42a)与基板输送方