Device for measuring thin film doping proportion and measuring method

The invention discloses a device for measuring a doping proportion of an organic semiconductor, and a measuring method. The device comprises a sensor, a shading structure and a light source, wherein the sensor is configured to be capable of detecting an I/V curve of a thin film to be measured; the s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FENG YONGSHAN, QIAN HONGCHANG, HE XINRU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a device for measuring a doping proportion of an organic semiconductor, and a measuring method. The device comprises a sensor, a shading structure and a light source, wherein the sensor is configured to be capable of detecting an I/V curve of a thin film to be measured; the shading structure has a light leakage region, and light emitted from the light source can irradiate the thin film to be measured through the light leakage region of the shading structure; the light source comprises a plurality of monochromatic light sources, or the light source is a white light source, at least one optical filter is arranged between the white light source and the shading structure, and light emitted by the white light source can pass through the optical filter and then pass through the light leakage region of the shading structure to irradiate the thin film to be measured. Therefore, the device has high measurement precision, and can measure the doping proportion of the thinfilm with small doping pr