Pressure control device and semiconductor equipment

The invention discloses a pressure control device and semiconductor equipment. A reaction chamber is connected with a vacuum generator. The pressure control device comprises a pressure sensor used formeasuring the pressure P of the reaction chamber in real time, an electric control pressure regulati...

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Bibliographische Detailangaben
1. Verfasser:	LU YANXIAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONTROLLING PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
Online-Zugang:	Volltext bestellen
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