Charged particle beam apparatus and machine learning method

An image conversion unit (28) includes a selector (30) and a plurality of image converters (32-1, ... 32-n). Each image converter is formed from an estimator of machine learning type, and estimates, based on an image acquired under a first observation condition and as a reference image, an image which is presumed to be acquired under a second observation condition. When a particular reference image is selected from among a plurality of reference images displayed on a display (36), a second observation condition corresponding to the selected reference image is set in an observation mechanism (10) as a next observation condition. 一种带电粒子束装置和机器学习方法，其中，图像转换部(28)包含选择器(30)和多个图像转换器(32-1、...、32-n)。各图像转换器由机械学习型的推定器构成，根据在第1观察条件下取得的图像，推定在第2观察条件下可能会取得的图像作为参考图像。当从显示于显示器(36)的多个参考图像之中选择了特定的参考图像时，与其对应的第2观察条件作为接下来的观察条件被设定在观察机构(10)中。