METHOD FOR IMPROVING CYCLE TIME

A method for improving a cycle time of a process of a product is provided. The method includes: collecting process profile data from a plurality of tool groups running the process, and calculating values of a plurality of key-performance-indicators (KPIs) of each tool group including calculating a s...

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Bibliographische Detailangaben
Hauptverfasser: CHENG CHAO-MING, WANG PO-YI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A method for improving a cycle time of a process of a product is provided. The method includes: collecting process profile data from a plurality of tool groups running the process, and calculating values of a plurality of key-performance-indicators (KPIs) of each tool group including calculating a standard deviation of an output of a stage of a bottleneck tool group of the tool groups; feeding thevalues of the KPIs and a work-in-progress (WIP) of each tool group into a neural network model in order to output an impact on the WIP for each KPI of each tool group by the neural network model; selecting a set of major KPIs of each tool group from the KPIs according to the impact of each tool group; and controlling the tool groups according to the impact of the set of major KPIs of each tool group in order to reduce a total WIP. Thus, the process cycle time of a product can be improved. 本揭露实施例提供一种用于使产品的工序的生产周期改善的方法。所述方法包括:从运行所述工序的多个工具群组收集工序剖面数据,且计算每一工具群组的多个关键性能指标(KPI)的值,所述计算包括计算所述工具群组中的瓶颈工具群组的阶段的输出的标准偏差;将每一工具群组的关键性