PRESSURE-REDUCTION UNIT EQUIPPED WITH HEATER, AND BATTERY MANUFACTURING EQUIPMENT

A pressure-reduction unit 1 equipped with a heater for carrying out, in a reduced-pressure processing chamber 4, pressure-reduction thermal processing on a substrate 17 to which a liquid material hasbeen applied, wherein multiple support pins 16, which are capable of supporting from below the substr...

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Bibliographische Detailangaben
Hauptverfasser:	BABA MAMORU, IKEGAMI TAKAHIRO, MASUNARI SEIJI, NAKATANI HIDEYUKI, HOSOKAWA TOMOKO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY SPRAYING OR ATOMISING IN GENERAL TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	A pressure-reduction unit 1 equipped with a heater for carrying out, in a reduced-pressure processing chamber 4, pressure-reduction thermal processing on a substrate 17 to which a liquid material hasbeen applied, wherein multiple support pins 16, which are capable of supporting from below the substrate 17 present in the reduced-pressure processing chamber 4, are erected and secured at fixed positions, and the multiple support pins 16 are inserted respectively into multiple through-holes formed in a heater plate 12 containing a heater, thereby holding the heater plate 12 so as to be capable ofmoving up and down. 本发明提供一种带加热器的减压单元(1)，其将涂敷有液状材料的基板(17)在减压处理室(4)内进行加热减压处理，其中，能够从下方支承位于减压处理室(4)内的基板(17)的多个支承销(16)立设固定在固定位置，并且多个支承销(16)分别插通在内置有加热器的加热板(12)上形成的多个贯通孔，将加热板(12)以能够升降的方式保持。