Purification method of electronic-grade octafluorocyclopentene
The invention relates to the field of fine chemical engineering, in particular to a purification method of electronic-grade octafluorocyclopentene. The method comprises the steps of rectification purification, low-temperature adsorption purification, pressurized adsorption purification and the like....
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Format: | Patent |
Sprache: | chi ; eng |
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