Purification method of electronic-grade octafluorocyclopentene

The invention relates to the field of fine chemical engineering, in particular to a purification method of electronic-grade octafluorocyclopentene. The method comprises the steps of rectification purification, low-temperature adsorption purification, pressurized adsorption purification and the like....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHOU JINGSEN, CHEN GANG, ZHANG XUELIANG, LI JUN, ZHANG XIAODONG, ZHANG GUANGDI, XIA TIAN, ZHANG XUEGANG, ZHANG YUNFENG
Format: Patent
Sprache:chi ; eng
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