Purification method of electronic-grade octafluorocyclopentene

The invention relates to the field of fine chemical engineering, in particular to a purification method of electronic-grade octafluorocyclopentene. The method comprises the steps of rectification purification, low-temperature adsorption purification, pressurized adsorption purification and the like. According to the method, the final product octafluorocyclopentene is obtained from raw material cyclopentene which is easy to obtain by using a gas phase process. A low-temperature rectification technology is adopted, and combined with a low-temperature adsorption technology and a pressurized adsorption technology to purify the octafluorocyclopentene; modified coconut shell charcoal is used as a mesoporous low-temperature adsorbent; further separation purification is performed through membraneseparation, so that the volume concentration of a water impurity in the octafluorocyclopentene product is less than or equal to 5 ppm; the volume concentration of an oxygen impurity is less than or equal to 3.5 ppm, and the v