Wafer boat stretching device and semiconductor processing device

The invention provides a wafer boat stretching device and a semiconductor processing device. The wafer boat stretching device comprises a plurality of linear driving devices connected stage by stage and connection sliders disposed on the respective linear driving devices, wherein each linear driving device is configured to move all linear driving devices in the same stage in the horizontal direction; the linear driving device in the last stage is connected with a wafer boat; and the linear driving devices and the connection sliders are provided in sets. The wafer boat stretching device and thesemiconductor processing device can move the wafer boat horizontally, have good stability, and are easy and convenient to assemble, thereby improving production efficiency and production stability. 本发明提供一种晶舟伸展装置及半导体加工设备，包括逐级连接的多个直线驱动装置和设置在各个直线驱动装置上的连接滑块；每级直线驱动装置用于驱动位于该级别以下的所有直线驱动装置整体沿水平方向移动；最下级的直线驱动装置用于与晶舟连接；直线驱动装置与连接滑块成套设置。本发明提供的晶舟伸展装置及半导体加工设备能够水平运载晶舟，并具备良好的稳定性，且装配简单便捷，从而提高生产效率及生产稳定性。