Vertical-type quartz tube automatic cleaning machine and cleaning method

The invention discloses a vertical-type quartz tube automatic cleaning machine and a cleaning method. The vertical-type quartz tube automatic cleaning machine comprises a shell, and further comprisesa control system, a cleaning cavity, a liquid storing tank and a spraying mechanism which are arrange...

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Hauptverfasser: WU HAIHUA, LIAN HAIZHOU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a vertical-type quartz tube automatic cleaning machine and a cleaning method. The vertical-type quartz tube automatic cleaning machine comprises a shell, and further comprisesa control system, a cleaning cavity, a liquid storing tank and a spraying mechanism which are arranged in the shell; a backflow hole and a base plate support seat are arranged at the bottom of the cleaning cavity; a pneumatic distribution valve group is mounted below the backflow hole and connected with the liquid storing tank, a wastewater discharging outlet and a waste liquid discharging outlet,wherein the wastewater discharging outlet and the waste liquid discharging outlet are formed in the shell; and the base plate support seat is connected with the liquid storing tank, a cleaning pipeline and a first nitrogen pipeline through a liquid inlet pipeline. The cleaning efficiency and cleaning quality of the cleaning machine can be improved, meanwhile acid liquid and alkali liquid can be recycled, and thus the prod