PROBE STRUCTURE AND METHOD FOR PRODUCING PROBE STRUCTURE

This probe structure 1 is provided with: a holding plate 2 which has a first surface 21 and a second surface 22, and wherein at least the first surface 21 is insulated; a plurality of electrodes 3 which are formed on the first surface 21 of the holding plate 2 in such a manner that the plurality of...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	MAEDA MICHIHISA, NUMATA KIYOSHI, YAMASAKI HIDEKAZU, FUJINO MAKOTO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOUNDS THEREOF ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES METALLURGY NANOTECHNOLOGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TESTING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	This probe structure 1 is provided with: a holding plate 2 which has a first surface 21 and a second surface 22, and wherein at least the first surface 21 is insulated; a plurality of electrodes 3 which are formed on the first surface 21 of the holding plate 2 in such a manner that the plurality of electrodes 3 are separated from each other; and carbon nanotube structures 4 which are provided on the electrodes 3 in such a manner that the carbon nanotube structures 4 stand upright thereon. The holding plate 2 is provided with through holes 24 which correspond to the electrodes 3, respectively. 本发明的探针构造体1具备：保持板2，具有第一面21与第二面22、且至少所述第一面21经绝缘；多个电极3，以相互分离的状态形成于所述保持板2的第一面21上；以及碳纳米管构造体4，立设于所述电极3上；且在所述保持板2中形成有与所述各电极3相对应的贯穿孔24。