Vacuum relief valve

The present invention relates to a vacuum safety valve for a vacuum pump, in particular for a rotary vane pump, comprising a housing having a flow path extending between an inlet and an outlet for a gas to be conveyed, a valve region that is disposed in the flow path and in which a valve closure element is arranged that is movable between a closed position and an open position, a control space that is associated with the valve region and in which a membrane separating the pressure side from an operating side is arranged, and a control element active between the membrane and the closure element, wherein the closure element is movable via the control element against a return force from the closed position into the open position by means of the membrane acted on at the pressure side and is movable back into the closed position on a removal of the membrane load due to the return force and is held in the closed position. 本发明涉及用于真空泵、尤其用于旋转叶片泵的真空安全阀，包括：壳体，其具有在入口与出口之间延伸的流动路径用于输送气体；阀区域，其设置在所述流动路径中，并且可在关闭位置与打开位置之间移动的阀封