Reaction chamber and semiconductor processing device

The invention provides a reaction chamber and a semiconductor processing device. The reaction chamber comprises a chamber side wall, a chamber bottom wall, a heat exchange element and a heat exchangesource for providing energy, wherein the heat exchange element includes a first part uniformly distri...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIANG HONGWEI, YANG XIONG, CHENG XUWEN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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