Scanning mirror, scanning device, and illumination device

The invention relates to a scanning mirror (9a) for deflecting a laser beam, comprising: a base body (12) and a mirror (15) for reflecting the laser beam. The base body (12) has a three-dimensionallystructured rear side (14) and is made of glass, in particular quartz glass, or glass ceramic, in part...

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Bibliographische Detailangaben
Hauptverfasser:	MARTE TOBIAS, BRUSTLE REINER
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	The invention relates to a scanning mirror (9a) for deflecting a laser beam, comprising: a base body (12) and a mirror (15) for reflecting the laser beam. The base body (12) has a three-dimensionallystructured rear side (14) and is made of glass, in particular quartz glass, or glass ceramic, in particular microcrystalline glass. The invention also relates to a scanning device having at least onesuch scanning mirror (9a) and to an illumination device having such a scanning device. 本发明涉及一种用于使激光射束偏转的扫描镜(9a)，包括：基体(12)以及用于反射激光射束的镜面(15)。基体(12)具有三维结构化的背侧(14)并由玻璃、尤其石英玻璃或由玻璃陶瓷、尤其微晶玻璃构成。本发明也涉及一种具有至少一个这种扫描镜(9a)的扫描装置以及一种具有这种扫描装置的照射装置。