System utilizing catalyst to enhance silane reaction synthesis and complete recovery of process by-products

The invention provides a system utilizing a catalyst to enhance silane reaction synthesis and complete recovery of process by-products. A newly developed and designed separation purification system and technique are adopted to separate a silane gas mixture generated by a reaction from solid raw materials participating the reaction; then the silane gas mixture is subjected to low-temperature gas liquid separation according to physical properties; recovery of an ammonia raw material in monosilane, purification of monosilane, and removal of impurities are achieved by a monosilane fractionating system; disilane and an ammonia raw material which undergo gas-liquid separation are fractioned and purified through a disilane fractionating system. In combination with the unique catalyst applicationtechnique developed to increase the disilane conversion rate, a novel feeding manner and novel equipment, and through recovery of ammonia for use as a reaction raw material again, the productivity andpurification processes of