INSPECTION SYSTEM AND MALFUNCTION ANALYSIS/PREDICTION METHOD FOR INSPECTION SYSTEM

An inspection device (100) having: a prober (200) that has a stage (26) holding a substrate (W) having a plurality of devices formed thereupon, a transport unit (22) that transports the substrate (W)to the stage (26), and a probe card (25) that causes a plurality of probes 25a to come in contact with electrodes in the plurality of devices upon the substrate (W); a tester (300) that applies an electric signal to the plurality of devices upon the substrate (W) via the probe card (25) and inspects the electrical characteristics of the devices; and a malfunction analysis/prediction unit (400) that, when a malfunction has occurred during inspection or a sign indicates a stage prior to a malfunction, analyzes history information for the prober (200) and tester (300) related to that malfunctionand ascertains or predicts the location of the malfunction. 检查装置(100)具有：探测器(200)，其具有用于保持形成有多个器件的基板(W)的载置台(26)、将基板(W)搬送到载置台(26)的搬送部(22)以及使多个探针(25a)与基板(W)上的多个器件的电极接触的探针卡(25)；测试器(300)，其经由探针卡(25)将向基板(W)上的多个器件提供电信号，来检查器件的电气特性；以及故障分