Two-dimensional auxiliary vibration imprinting device and method

The invention relates to a two-dimensional auxiliary vibration imprinting device and method. The device comprises a workbench, an XY axis displacement table, a Z axis displacement table, a two-dimensional micro-motion platform, an imprinting device and a heating plate. The method comprises the following steps of: placing a substrate subjected to gluing on a two-dimensional micro-motion platform, moving the two-dimensional micro-motion platform to the lower part of a template by an XY axis displacement platform, preheating photoresist by a heating plate until the photoresist does not reach a vitrification temperature, starting the two-dimensional micro-motion platform and driving the substrate to achieve two-dimensional vibration after the preheating is finished, controlling an imprinting device by a Z axis displacement platform to imprint the substrate, performing cooling and curing in air after the imprinting is finished, and finally performing vibration auxiliary demoulding. The two-dimensional micro-motion