HOLDER FOR HOLDING AND FOR PROTECTING A SIDE OF A PHOTOMASK OR A PHOTOMASK HAVING PELLICLE FROM A CLEANING MEDIUM, METHOD FOR CLEANING A PHOTOMASK OR A PHOTOMASK WITH PELLICLE AND DEVICE FOR OPENING AND CLOSING A HOLDER

The invention relates to a holder for holding and for protecting a side of a photomask or a photomask having pellicle from a cleaning medium, to a method for cleaning such a photomask, and to a device for opening and closing a holder. The holder (1) has a base having at least three support elements (15), which are arranged at a distance from a bottom (9) of the base for holding and for retaining the photomask or the photomask having pellicle, and has sealing frame (7, 20, 21), having a top side (24) and a bottom side (25), wherein the bottom side can be placed onto the base, and wherein the sealing frame has a center opening (26), which is dimensioned in such a way that the center opening can accommodate the photomask with spacing. A peripheral, elastic sealing element (22) is provided on the sealing frame, which sealing element extends from the inner periphery of the center opening into the center opening at an angle to the top side of the sealing frame, wherein, in an unloaded state, the sealing element has