Energy filtering magnetron sputtering coating device, preparation method of transparent electric conducting oxide thin film and HJT battery

The invention discloses an energy filtering magnetron sputtering coating device, a preparation method of a transparent electric conducting oxide thin film and an HJT battery. The device comprises a sputtering target material and a substrate support which are arranged oppositely in a vacuum room. A substrate needing coating is arranged on the opposite face of the substrate support and the sputtering target material. A filtering electrode parallel to the sputtering target material is arranged between the sputtering target material and the substrate. The filtering electrode is composed of a plurality of metal wires parallel to one another. The metal wires are connected to the substrate support. The transparent electric conducting oxide thin film is manufactured through the device. The transparent electric conducting oxide thin film contained in the HJT battery is manufactured through the method. The device has the advantages that the shielding area is small, the deposition speed is high, the target material util