PERC battery manufacturing method

The invention discloses a PERC battery manufacturing method, which comprises the steps of feeding a battery piece semi-finished product subjected to oxidation treatment into a reaction chamber, and only enabling the back of the battery piece semi-finished product to be in contact with a gas in the reaction chamber; vacuumizing the reaction chamber, introducing a protective gas under set pressure intensity, heating the reaction chamber until the temperature and the vacuum degree in the reaction chamber meet set requirements, and introducing the reaction gas; decomposing molecules of the reaction gas into plasmas by using a radio frequency technology, wherein the plasmas move in the reaction chamber to impact the back surface of the battery piece semi-finished product so as to enable dirt on the back surface of the battery piece semi-finished product to be separated from the battery piece semi-finished product. According to the invention, improvement is carried out on the basis of the existing PERC process, PEC