Electron beam detecting system

The embodiment of the invention provides an electron beam detecting system comprising an electron collecting bracket, an electron collecting device movably mounted on the electron collecting bracket, and a first drive unit connected with the electron collecting device. The electron collecting device is used for moving along the electron collecting bracket under the driving force effect. The first drive unit is used for providing the driving force required by the electron collecting device. 本发明实施例提供一种电子束检测系统。所述电子束检测装置，包括：电电子收集支架，电子收集装置，活动安装在所述电子收集支架上，用于在驱动力作用下沿所述电子收集支架运动；第一驱动装置，与所述电子收集装置连接，用于向所述电子收集装置提供运动所需的所述驱动力。