Automatic probe cleaning method and system for probe card

Disclosed is an automatic probe cleaning method for a probe card. The method includes the following steps: a step of cleaning module pressing, namely a step of pressing a cleaning module by at least one probe of the probe card to remove stuck matters of the probes; and a step of negative pressure ad...

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Bibliographische Detailangaben
Hauptverfasser: WU ZHENWEN, WU SONGLIN, LI MAOSHAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:Disclosed is an automatic probe cleaning method for a probe card. The method includes the following steps: a step of cleaning module pressing, namely a step of pressing a cleaning module by at least one probe of the probe card to remove stuck matters of the probes; and a step of negative pressure adsorption of the stuck matters, namely a step of providing negative pressure for the cleaning module to make the negative pressure adsorb the stuck matters. 一种探针卡自动清针方法,其步骤包括:按压清洁模块,至少一探针卡的探针按压一清洁模块,以去除该探针的沾黏物;以及负压吸附沾黏物,提供一负压给该清洁模块,以使该负压吸附该沾黏物。