Equipment and method for manufacturing graphene

The invention provides equipment and method for manufacturing graphene. The method comprises the following steps: enabling solid copper to be melted into a copper solution; receiving the copper solution and enabling the copper solution to generate copper foil with a preset thickness and preset width...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MA ZHEGUO, CHEN JINYUAN, WANG HUIHUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides equipment and method for manufacturing graphene. The method comprises the following steps: enabling solid copper to be melted into a copper solution; receiving the copper solution and enabling the copper solution to generate copper foil with a preset thickness and preset width during flowing downwards in a curtain mode; supplying various gases required for the growing the graphene to the copper foil at a preset position where the generated copper foil has preset temperature, and growing the graphene on the copper foil through a chemical vapor deposition process so as to form a graphene/copper foil superposition layer; supporting and carrying the graphene/copper foil superposition layer; and receiving the graphene/copper foil superposition layer, and enabling the graphene on the graphene/copper foil superposition layer to be transferred onto a flexible substrate. The equipment and method provided by the invention can avoid cleaning the copper foil before growing the graphene, can grow th