Inductance type pressure sensor, manufacturing method and application thereof

The invention discloses an inductance type pressure sensor, a manufacturing method and application thereof. The inductance type pressure sensor comprises a plane inductor, a ferrite film, an elastic support pillar and a flexible cover film, wherein the ferrite film is adhered into the flexible cover film, and is positioned between the plane inductor and the flexible cover film; and the elastic support pillar is supported between the plane inductor and the flexible cover film, so that an air gap exists between the ferrite film and the plane inductor. The inductance type pressure sensor has the characteristics of high sensitivity, short response time, high stability and high repeatability. 本发明公开了一种电感式压力传感器及其制作方法与应用，所述电感式压力传感器包括平面电感、铁氧体膜、弹性支柱和柔性覆膜；所述铁氧体膜附着于柔性覆膜上，位于平面电感与柔性覆膜之间；所述弹性支柱支撑于平面电感与柔性覆膜之间，使铁氧体膜与平面电感之间存有气隙。本发明具有灵敏度高，响应时间快，稳定性和重复性好的特点。