Robot-based planar surface shape subaperture stitching interference measurement device and method

The invention discloses a robot-based planar surface shape subaperture stitching interference measurement device and method. The device comprises an interferometer, an industrial robot and a coordinate system establishing component, wherein the interferometer can be installed on the industrial robot through a connecting tool; the coordinate system establishing component comprises a reference piece and a calibration piece; the calibration piece comprises a connecting disk capable of being installed on the industrial robot and a calibration rod arranged at one side of the connecting disk; the extension direction of the calibration rod is parallel to the installation axis of the connecting disk; and the point, farthest from the connecting disk, of the calibration rod is a calibration point. The device has the advantages of being flexible and simple in structure, wide in application range, efficient, safe, good in environment adaptability and the like, also has the advantages of high space resolution and the like