VERTICAL SUBSTRATE HOLDER

Described herein are apparatuses for holding a substrate in a near vertical position, wherein the design minimizes substrate sag while allowing the substrate to expand and contract under varying thermal conditions. The apparatus minimizes the stress on the substrate, preventing breakage of or damage...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MCDONALD MICHAEL AARON, PRESHER DONALD LYNN, WANG CHUANCHE, BUTLER BRYCE PATRICK, HUANG MING-HUANG, COUILLARD JAMES GREGORY
Format: Patent
Sprache:chi ; eng
Schlagworte:
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